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    PSM-LHe series

    PSM-LHe series

    The PSM-LHe series liquid helium low-temperature probe station can provide a 1.6K-450K high and low temperature vacuum testing environment for electrical parameter testing of semiconductor chips. By connecting different electrical measuring instruments externally, it can complete the detection of parameters such as voltage, current, resistance, and IV curve of integrated circuits, and is used for non-destructive electrical testing of chips, wafers, and devices in low-temperature vacuum environments.

    PSM-LHe series Overview

       The liquid helium low-temperature probe station plays a crucial role in scientific research and technological development. It can perform various non-destructive physical and electrical performance tests on samples at low temperatures, helping researchers gain a deeper understanding of the various physical and electrical properties of materials or devices, and providing important data support for the development and application of new materials.
             The PSM-LHe series liquid helium low-temperature probe station can provide a 1.6K-450K high and low temperature vacuum testing environment for electrical parameter testing of semiconductor chips. By connecting different electrical measuring instruments externally, it can complete the detection of parameters such as voltage, current, resistance, and IV curve of integrated circuits, and is used for non-destructive electrical testing of chips, wafers, and devices in low-temperature vacuum environments.

    Feature:
    • Liquid helium low-temperature vacuum probe station, with a chamber vacuum degree of up to 10E-4 torr.
    • The displacement adjustment of the probe arm is operated outside the vacuum chamber, allowing for switching between different devices on the sample for testing without damaging the vacuum.
    • Unique probe arm X-Y-Z-R four-dimensional adjustment, capable of testing up to 4-inch samples. Up to 6 probe arms can be installed simultaneously, and probe arms can be selected from DC arm, fiber arm, microwave arm, etc.
    • The material of the vacuum chamber is aluminum, which can effectively reduce external electromagnetic interference and improve the accuracy and stability of testing.
    • The probe arm adopts a three coaxial connector with good leakage performance, and the measured leakage current is less than 30fA@1V @1.6K--450K。
    • Wide temperature range for testing, supporting up to 1.6K-450K continuous temperature variation.

    PSM-LHe series Technical Parameter

    Parameters and indicators:

    Probe station host classification
    model
    PSM-LHe-2
     PSM-LHe-4
    temperature range
    1.6K--450K
    1.6K--450K
    Temperature control stability
    +/-50mK
    Sample holder
    Type and Material
    Oxygen free copper grounding gold-plated sample holder
    size2 inches4 inches
    Optional specifications
    Insulation sample holder (temperature can only reach 400K)
    Coaxial sample holder (temperature can only reach 400K)
    Triple coaxial sample holder (temperature can only reach 400K)
    Probe arm
    type
    DC probe arm (standard)
    Customizable specifications
    Microwave probe arm, fiber optic probe arm, thermocouple probe arm
    quantity4
    Connectors and cables
    Triple coaxial connector+ultra-thin coaxial low-temperature cable
    leakage current
    30fA@1V in a vacuum environment
    signal frequency
    DC-50MHz
    match impedance
    50Ω
    displacement rangeX+/- 12.5mm,Y+/- 50mm 
    Z +/-7.5mm, R+/-10°
    X+/- 12.5mm,Y+/- 50mm 
    Z +/-7.5mm, R+/-10°
    Optical system
    Microscope magnification
    500times
    resolution
    less than 2 microns
    field of view
    up to 22mm
    working distance
    90-100mm
    vacuum chamber
    material
    aluminum alloy
    vacuum chamber size
    8-inch
    Window size
    2 inches
    4 inches
    Vacuum chamber window
    Infrared absorption window
    inner layer
    Standard quartz window
    degree of vacuum
     5E-4 torr
    reserved interface
    2 probe arm interfaces&2 electrical interfaces
    Radiation shielding material
    stainless steel
    Specialized vibration isolation table
    size
    800*800*800
    900*900*800
    Table push
    Fixed feet&rollers
    vibration dampingGravity damping&air floating damping pad

    PSM-LHe series Basic Configuration

    Semiconductor
    IC
    Wafer

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